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Solid State Technology

Volume: 51
Issue: 2
Date: February 01, 2008
Improve productivity at nm nodes with faster physical verification
The increasing number and complexity of design rules result in a significant increase in design rule check (DRC) run times, many more DRC violations, and an increase in the intricacy of these violatio ...
Influence of immersion lithography on wafer edge defectivity
In semiconductor manufacturing, the control of defects at the edge of the wafer is a key factor to keep the number of yielding die on a wafer as high as possible.
Membrane compatibility for nanofiltration applications in DUV lithography
Typical photochemical solutions contain a variety of additives, often in trace amounts.
High-index materials research key to extending immersion lithography
The adoption of water-based immersion lithography into 45nm half-pitch processes is in full swing, but if optical lithography is to continue to dominate leading-edge semiconductors, some advances are ...
2007 International Technology Roadmap: MOSFET scaling challenges
The 2007 International Technology Roadmap for Semiconductors (ITRS) makes projections covering the next 15 years, through 2022.
Critical issues for commercialization of thin-film PV technologies
The market share for thin-film PV in the US continues to grow rapidly, from 10% in 2003 to ~44% in 2006.
Crystalline silicon solar cell manufacturing requires vacuum-based solutions
Crystalline silicon solar cell manufacturing requires vacuum-based processing tools for many critical steps, from mono- to polycrystalline silicon growth to thin-film depositions on silicon wafers.
World News
Technology news
Risk is reshaping the chip industry
What does the sub-prime mortgage meltdown have to do with chipmaking? In today’s global, interconnected economy, probably much more than we may think.
The state of standards
A survey of MEMS industry players reveals points of agreement and divergence on the ever-controversial topic of production standards.
Yield at any cost
Photomask costs are a painfully visible issue in today’s competitive semiconductor market.
Featured Products
Product News
Product Focus: Metrology / Inspection

Past Issues

2008

Volume Issue Date
51 12 Dec 01, 2008
51 11 Nov 01, 2008
51 10 Oct 01, 2008
51 9 Sep 01, 2008
51 8 Aug 01, 2008
51 7 Jul 01, 2008
51 6 Jun 01, 2008
51 5 May 01, 2008
51 4 Apr 01, 2008
51 3 Mar 01, 2008
51 2 Feb 01, 2008
51 1 Jan 01, 2008

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