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Solid State Technology

Volume: 48
Issue: 9
Date: September 01, 2005
A comprehensive control strategy for maximizing process capability
Advanced process control (APC) has become a central issue in wafer fabs when it comes to quickly introducing new technologies into production or fine-tuning tool performance for maximum yields.
The effects of wet-etch parameters on wafer-thinning etchants
Designed experiments determine the effects of wet-etch parameters on the performance of several different types of wafer-thinning etchants.
Porous low-k dielectrics using ultraviolet curing
It is essential to introduce porosity in carbon-doped oxides (CDO) to extend their applications to 45nm and beyond with k<2.5.
Minimizing equipment downtime through advances in wafer handling
Production ramps in 300mm fabs have increased the emphasis on equipment availability.
Determining printable defects with MEEF-based mask inspection
The aim of mask error-enhancement factor (MEEF)-based inspection is to increase photomask yields by adjusting defect specifications to exclude harmless aberrations and small defects that have no impac ...
Educating innovators
It was a rare quick exchange during Alan Greenspan’s testimony before a Senate finance committee.
World News
Technology News
Using advanced lithography to pattern nano-optic devices
Nano-optics - a class of highly compact, high-performance optical components that are readily customized and easily integrated with other optical devices and electronics - are of significant interest ...
A Roadmap perspective: Revisiting DFM
Solid State Technology asked experts to comment on the implications of Roadmap requirements on DFM.
Higher throughput and yields from laser scanning projection in WLP
To meet the patterning needs of wafer-level packaging (WLP), the IC industry has relied on familiar contact printers and stepper systems.
Product News
Attendees choose ‘best-in-show’ products
Solid State Technology invited Semicon West attendees to vote on the best products they saw at the July trade ...
Sizzling markets spark memory innovation
The demand for memory used to be driven mainly by business applications. That sector continues to grow with the rise of the Internet, e-commerce, and e-tailing, and much more active product tracking i ...
News & Products
Micro-drives: Hard-disk revival driven by thirst for mobile storage
Rapid growth in consumer electronics, particularly for mobile applications, is driving a surge in demand for hard-disk storage, particularly micro-drives.
System-on-Chip: Process integration solutions for 0.18μm embedded microFlash
Processing challenges have made it difficult to put flash memory on the same chip with CMOS logic.
Hard Disk Drives: Magnetic head processing technology for small form-factor hard drives
Platform-based process equipment and integrated process and metrology tools will be pivotal in advancing reliable, economical manufacturing of small form-factor hard disk drives (HDD).

Past Issues

2005

Volume Issue Date
48 12 Dec 01, 2005
48 11 Nov 01, 2005
48 10 Oct 01, 2005
48 9 Sep 01, 2005
48 8 Aug 01, 2005
48 7 Jul 01, 2005
48 6 Jun 01, 2005
48 5 May 01, 2005
48 4 Apr 01, 2005
48 3 Mar 01, 2005
48 2 Feb 01, 2005
48 1 Jan 01, 2005

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