Subscribe! eNewsletter Magazines About Us  |  Advertise  |  Contact Us  |  Site Map

Current Publications

Global Publications
advertisement
advertisement
Top

Solid State Technology

Volume: 48
Issue: 4
Date: April 01, 2005
Beyond AEC and APC: Wafer quality control
In semiconductor processing, the final yield is often a result of intensive interactions between process recipe parameters and manufacturing tool health.
Advanced process technology interconnect integration challenges
One of the main challenges of 65nm and 45nm Cu/low-k interconnect integration is the development of processes to accommodate low-k dielectrics with k = 2.
Mask metrology using OCD for profiling
Optical critical-dimension (OCD) metrology or “scatterometry” has experienced rapid growth in sub-0.1µm wafer processes for both CD measurements and line profiling.
The yuan, the dollar, and the future
China is on the verge of becoming the world’s largest consumer of semiconductor products, but several dark sides of this economic boom exist, and most have been examined in detail.
World News
Enabling concepts for low-energy ion implantation
Significant improvements in the mid-1990s, including advances in ion source technology and the introduction of reduced path-length beamlines, enabled production-worthy beam currents as low as the 5-10 ...
The future of ULK dielectrics
Solid State Technology asked industry experts to discuss ramifications and issues concerning ULK dielectrics development.
Selete outlines damage-control roadmap for porous low-k
Selete has developed methodology for reducing chemical and mechanical damage to ultralow-k films.
Product News
3D packaging issues for ultrasmall systems-in-a-cube
The intriguing concept of ultrasmall, autonomous, intelligent computing devices for wireless sensor networks could open up a wide range of applications, from human-health monitoring to highly distribu ...
High-end mask manufacturing using spatial light modulators
Optical and electron-beam maskwriters using raster-scanning beams have been workhorses in the semiconductor industry for a long time.

Past Issues

2005

Volume Issue Date
48 12 Dec 01, 2005
48 11 Nov 01, 2005
48 10 Oct 01, 2005
48 9 Sep 01, 2005
48 8 Aug 01, 2005
48 7 Jul 01, 2005
48 6 Jun 01, 2005
48 5 May 01, 2005
48 4 Apr 01, 2005
48 3 Mar 01, 2005
48 2 Feb 01, 2005
48 1 Jan 01, 2005

Previous Years

2009 2008 2007 2006 2004 2003 2002 2001 2000 1999 1998 1997 1996
View Complete Archives Section
 

advertisements