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Solid State Technology

Volume: 48
Issue: 11
Date: November 01, 2005
Using ‘statistical dashboards’ to automate particle and yield analysis
In semiconductor fabrication, optimized control over hundreds of process steps and multiple equipment sets is essential to achieving high yields in volume manufacturing.
Fluorine plasma chemistry for high-AR dielectric etching
As device sizes continue to shrink, anisotropic dielectric etching faces a daunting list of challenges that include etch selectivity, etch uniformity, aspect-ratio dependent etching, and etch stop.
The future of energy
Is the world running out of oil? Will there be enough fuel available as China and India rapidly industrialize?
Analyzing damage from ultralow-k CMP
Introduction of porous ultralow-k (ULK) materials poses challenges, such as poor mechanical properties due to porosity, that affect all unit processes, including CMP.
Controlling porous low-k damage with decoupled plasma etching
One of the key challenges in backend integration is damage to the low-k dielectric during etch/ash processes.
45nm node integration of low-k and ULK porous dielectrics
As the semiconductor industry approaches the 45nm process-technology node, the capacitance of the copper interconnect must be reduced to lower the RC delay and increase chip performance.
Technology News
Scientists have been trying to get an organic compound that emits a stable blue light with a lifetime that exceeds the previously thought 1000 hr lifetime barrier ever since Shuji Nakamura’s inv ...
Consumer economics drive FPD manufacturing strategies
The challenge in discussing flat-panel displays (FPD) is that they are both a technology and an application.
Product News
Reaching 45nm requires an accelerated flow of innovation
If the industry is to reach the 45nm node by decade’s end, it will be due, in large part, to a continuing acceleration of the flow of innovation, mostly from the bottom up.
Japan ramps up for high-volume SOI-based manufacturing
The silicon-on-insulator (SOI) revolution that was first launched in Japan more than 25 years ago is returning home.
What’s driving outsourced assembly and test in Japan
Successful suppliers to the semiconductor industry must acknowledge the importance of Japan in semiconductor manufacturing.

Past Issues

2005

Volume Issue Date
48 12 Dec 01, 2005
48 11 Nov 01, 2005
48 10 Oct 01, 2005
48 9 Sep 01, 2005
48 8 Aug 01, 2005
48 7 Jul 01, 2005
48 6 Jun 01, 2005
48 5 May 01, 2005
48 4 Apr 01, 2005
48 3 Mar 01, 2005
48 2 Feb 01, 2005
48 1 Jan 01, 2005

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