Low-temperature pre-metal dielectrics for future Ics
Somnath Nag, Raman Ramamurthy, W. Jack Lei, Christophe Monteil, Mark Hickey, Watkins-Johnson Co., Scotts Valley, California
Advanced process control for epitaxial silicon
A precise and accurate Fourier transform infrared spectroscopy-based epitaxial silicon characterization technique provides information on the doping profile as well as epi layer thickness. This compre ...
Safety and environmental concerns of CVD copper precursors
Bob Zorich, Mary Majors, Schumacher Division of Air Products and Chemicals Inc., Carlsbad, California
Transparent film metrology tool
This transparent film metrology system, SpectraLASER UTF, can characterize ultrathin films (<40 ?) and ultrathin film stacks such as ONO and OPO. Through the RTI Ultrathin Film Support Program, the UT ...
FPD UV exposure system
The ProForm 9000 is a fully automatic flat panel display UV exposure system that aligns and precisely exposes large glass substrates, such as those used for plasma display panels. Its automatic horizo ...
Polymeric die attach adhesive
THERMAXX 2600K thermal management adhesive has thermal conductivity measured at 20 W/m?K, eight to 10 times higher than existing conductive epoxy adhesives, and can be used in a wide range of packagin ...
High NA step-and-scan
The FPA-5000ES2 step-and-scan system has a very high (0.68) numerical aperture that covers both 0.25 and 0.18-?m design rules, using 248-nm KrF excimer laser illumination. As a dual-era machine, the E ...
Ion Implant metrology
Thermal-wave technology enables the Therma-Probe 500 metrology tool to measure directly on product or test wafers, immediately after ion implant. This ensures that the measurement reflects the perform ...
Wafer dicing and singulation
Wafer dicing and singulation
The NSX-250 is designed for dicing difficult semiconductor materials such as GaAs, SiGe, composites (SOI), ceramics, PZT, and other advanced materials. Also, its design allows for high-productivity an ...
Expanded CV test systems`
The System 80 Series of CV measurement instruments has been expanded to include I-V testing, analysis software, and integration with hot chucks and probers. These systems can provide simultaneous quas ...
Expanded CV test system
The System 80 Series of CV measurement instruments has been expanded to include I-V testing, analysis software, and integration with hot chucks and probers. These systems can provide simultaneous quas ...
Die sort handler`
Input for the DSH 5000 die sort handler system can be film frames, trays, or custom fixturing. The main pick-and-place movement uses a high-speed closed loop linear servo motor for speed and accuracy. ...
The virtual corporation emerges
In a capitalistic system, it is generally accepted that the more important a corporation is in contributing to the system, the higher the corporation`s value. This value is derived by the relevance to ...
E-beam inspection detects hidden defectsq
After years of being considered a technique of the future, automated electron-beam (e-beam) inspection of semiconductor wafers now offers clear benefits. New complexities in structures, materials, and ...
Rapid innovation in spite of slow market
In a technology-driven business such as chipmaking, the spirits of invention and innovation are always present, even when markets are soft, and this year`s show featured many examples. Indeed, a numbe ...
Where do we go from here?
When the semiconductor industry was escalating, full steam ahead, back in the 1994-1996 era, "experts" assured us that the upward trend would continue into the new millennium. (Those were the days, my ...
Worldwide highlights
SIA chip sales figure down in May. After several months of marginal declines, worldwide chip sales saw a sharper drop of nearly 4% month-to-month in May, with sales for the month dipping to the $10 bi ...
USA
Applied Materials says it will have a quarterly order rate of just $600 million to $675 million in its current 3Q, substantially lower than its earlier guidance of $950 million, and below Wall Street ...
Japan
Yen falls further against the dollar. The Japanese yen has slipped to a seven-year low against the US dollar. Some observers are looking for a continuation of the yen`s weakening trend. This will tend ...
Asia/Pacific
Wall Street sees further tool declines in Asia. Taiwan Semiconductor Manufacturing Co. (TSMC) is making a $300 million cut in its 1998 capital budget, and Singapore rival Chartered Semiconductor is po ...
Europe
With two CMP tool orders slated to ship later this year, Germany-based Peter Wolters is moving into the CMP market, and has formed a new subsidiary - Peter Wolters CMP Systems, Rendsburg, Germany - to ...
Interconnect:The new frontier
On-chip interconnect is now one of the most challenging areas of IC processing, though it has not always been so. Until the late 1980s, the greatest challenges to processing lay in forming the active ...
NIST report shows billions spent for metrology capability
NIST report shows billions spent for metrology capability. The US semiconductor industry spent between $2.3 billion and $2.5 billion in 1996 to buy measurement tools and instruments used in support of ...
Supercritical CO2 blasts photoresist
Cooperation between Los Alamos National Laboratory and Hewlett-Packard has produced a system that uses supercritical carbon dioxide (CO2) fluid properties to remove photoresists from wafers. The beaut ...
SLDRAM designing underway at MOSAID
International consortium SLDRAM Inc. has signed a contract with MOSAID Technologies to design the open standard that will establish the next generation of solutions for computer memory. MOSAID is an i ...
Ballistic conductance observed in carbon nanotubes
A team of scientists from Georgia Institute of Technology has observed ballistic conductance - a phenomenon in which electrons pass through a conductor without heating it. The observation was made at ...
400-mm development on track
K. Takada, director of Japan`s Super Silicon Crystal Research Institute (SSi), said the first 400-mm CZ crystal growth furnace was installed last October and a second one will be in place in 1999 at S ...
Effectiveness of water-based flourine scrubbing proven
Recent development work has shown the viability of water scrubbing, with and without a noncaustic additive, for treating corrosive fluorine gas effluent and essentially eliminating the potential of pr ...
Interconnect options grow
A tremendous amount of worldwide activity is focused around developing on-chip interconnects that can function at ever increasing circuit speeds. While copper conductors and low-k dielectric insulato ...
Modeling the yield of mixed-technology die
The negative binomial model for yield prediction has several shortcomings when applied to devices that contain a mixture of different types of circuitry. This article describes those weaknesses, and p ...
Japan FPD producers see sales up
After a difficult fiscal year, in which Japanese flat panel display (FPD) producers missed their overall sales goals by more than 20%, manufacturers expect display sales to soar during the current yea ...
Japan tool firms cut FY forecast
A new assessment of mid-term equipment market conditions from the Semiconductor Equipment Association of Japan (SEAJ) paints a less-than-rosy picture of the next two and a half years, with Japanese eq ...
Nan Ya follows TSMC in Taiwan capital spending cuts
Taiwan foundry Nan Ya Technology has cut capital spending plans this year by 63%, to NT$4 billion (US$116 million), while Taiwan Semiconductor Manufacturing Corp. (TSMC) has finalized its new 1998 spe ...
Acer cuts DRAM output
Acer Semiconductor Manufacturing Inc. (ASMI), the former TI-Acer joint venture, has said it will make a significant cut to its DRAM output as it shifts to logic, other memory devices, and custom found ...
Eastern Germanys "Silicon Saxony" attracting high-tech business
Often referred to as "Silicon Saxony," this eastern region of Germany has attracted more than 350 microelectronics firms in the past few years due to its central location, educated work force, and gov ...
On the brink: Flat panel monitors
The development of flat panel displays (FPDs) in a variety of technologies has been the major focus of display industry researchers for the past 10 years. Although the first portable computers feature ...
On-chip interconnects- gigahertz and beyond
Conventional VLSI on-chip interconnect systems will soon hit multi-GHz performance barriers. Metal planes/meshes and larger cross-sectional area signal lines can provide an impedance-controlled enviro ...
FSI International Inc.
FSI International, Inc.
FSI International Inc., Minneapolis, MN, has appointed Ajit Rode senior VP and GM of Semiconductor Systems Inc., a subsidiary. He has held executive management positions with Spectrian, Novellus, Tekt ...
Virtual ion implant service
Remote Assist, a virtual service system offered by an ion implant supplier, uses video conferencing technology and a helmet equipped with a camera and microphone to link fabs with the supplier`s produ ...
1998 MRS catalog
This catalog provides a listing of books, videotapes, journals, and periodicals available through the Materials Research Society (MRS). Topics in electronic materials and processing include beam proce ...
Crystal and glass wafering
New wafering capabilities, including the processing of crystals and glasses such as quartz, fused silica, silicon, infrared materials like ZnSe, and others, are being offered by an ISO 9002 company. B ...
Sensor shipping program
A sensor manufacturer introduces Rapid Ship, a program designed to ship stock sensors the same day, when orders are placed by 2 pm. The company stocks more than 65 sensors with 4.5 million possible co ...
SIMS profiling
This SIMS depth-profiling service is aimed specifically at low-energy implant qualification and thin-layered devices. Using impact energies as low as 100 eV, Applied SIMS Profiling offers a depth reso ...
IC Manufacturers reference
IC manufacturers reference
Strategic Reviews provides detailed profiles of approximately 200 IC manufacturers and suppliers. Each company review features an account of key management personnel, financial performance, fab facili ...
1998
1998 SIA resource guide
The SIA 1998 Annual Report & Directory, which provides comprehensive information on major industry trends and producers, is now available on the Internet. Product and corporate information about Semic ...
Semiconductor careers on-line
Developed and maintained by a provider of internet software and services, this web site lists career opportunities within the semiconductor industry. Information is regularly compiled from more than 7 ...
On-site wafer management service
Principle Solutions is a service program designed to help increase the efficiency and effectiveness of wafer management activities throughout a fab. Under the program, all aspects of wafer handling in ...
SPIEs 1998-1999 continuing education catalog
This 88-page catalog offers a complete listing of SPIE`s regional short courses. Short courses in microelectronic manufacturing include the physics of metrology instruments; plasma processing; submicr ...
Data-handling issues for OPC
Five years ago, most industry experts dismissed full-chip optical proximity correction mask enhancement as utterly impractical for volume production. The compelling need for resolution-enhanced photom ...
Praise from the Smithsonian
I have had the opportunity to read the two supplements (Southwest Supplement, Literature Showcase) to your October 1997 issue. They were very informative! Through collecting 30 years (1964-1994) of te ...
Readers flip for flip chip
Readers flip for flip chip
I subscribe to Solid State Technology. I am mostly interested in flip-chip package technology and am working in that area. I carefully read Pete Burggraaf`s article "Chip scale and flip chip: Attracti ...
Clarifications
In "Metrology/inspection market growth," World News, July, p. 26, the second sentence should have read that "the market grew to $1.101 billion in 1997, up 6.3% from $1.035 billion the year before."
Spectral data acquisition brochure
This six-page, color brochure highlights the SpectraSense/NCL spectral data acquisition system for spectroscopic applications, including fluorescence, laser, and LED characterization; optics testing; ...
Pattern-generation system
The MEBES 5000 is an electron-beam raster-scan pattern-generation system that meets the accuracy and throughput requirements of the 0.18-?m mask generation. With the new system, the user retains contr ...
Shaped-beam reticle writer
The ZBA31H+ is an electron beam reticle writer designed to expose the new 230-mm mask standard. The lithographic performance of the ZBA tool has been acceptedfor maskmaking of 0.25- and 0.18-?m produc ...
DUV step-and-scan lithography
Designed for =0.18-?m device capability, the Micrascan III+ step-and-scan system has a 55-nm tool-to-tool overlay, low optical distortion, 180-nm resolution, and throughput up to 90 wafers/hour. Field ...
RGA for HV/UHV applications
The QualiTorr Orion Compact (QOC) residual gas analysis (RGA) system is usedin single-chamber tools as well as on cluster tools, providing continuous monitoring in loadlock chambers and base pressure ...
Wall-mounted gas monitor
The Guardian family of wall-mounted continuous gas monitors is available for carbon monoxide, hydrogen sulfide, oxygen, chlorine, sulfur dioxide, hydrogen cyanide, hydrogen chloride, nitrogen dioxide, ...
Pressure regulators
The 700 Semiconductor Series pressure regulator is precision-machined from low-sulphur 316L stainless steel VAR and delivers ultrahigh-purity, high-pressure, low-hazard gases - such as halocarbons, ca ...
Chemical dispensing
GenStream is a completely modular system for dispensing TEOS and other source chemicals. It saves fab space by offering top access to all major connections, and also provides easy access to 5-gallon D ...
Plasma source
The Stinger is a new plasma source for the Performance Enhancement Platform (PEP) systems. It uses the same microwave source technology that is featured in the Millennia 300-mm integrated clean system ...
Thermal processing system
The four-tube, horizontal Cyclone thermal processing system processes wafers up to 150 mm. Users can select from two "flat zones" for use with existing tubes (760/1010 mm): 30/40-in. flat zone for 6-8 ...
Hardware cleaning
The CO2 MiniBlast Model SDI-5 is a CO2 blasting unit that can use any form of dry ice, including blocks, pellets, and nuggets. It cleans coater cups, teos valves, ammonium nitride, etch parts, and imp ...
Ultrasonic tank energy meter
This multi-frequency ultrasonic meter detects energy in ultrasonic cleaning tanks from 0-100 w/gal and also detects and displays frequencies from 0-200 KHz. Overall energy distribution and transducer ...
Silicon slicing
Silicon slicing
The Multi Wire Saw (MWS) line of wire saws consists of five models and is designed for automatic slicing of super-hard materials and ceramics, including silicon ingots for the semiconductor industry. ...
VLSI test system
The VS 2000e is an optional configuration of the high-pin-count Valstar Series VS 2000 test system. The 2000e matches all the capabilities of the 2000 for testing the complex logic, embedded memory, a ...
Digital marking system
MARKEM Q2001 OptiMark operates at speeds 40-100% faster than its predecessor, the Q2000, and combines the high quality and package integrity of pad printing with the flexibilty, low cost, and high yie ...
Low-k dielectric
Accuspin T-23 LOSP (low organic siloxane polymer) is a non-etchback inorganic material for gapfill applications with the goal of retaining low-k values over a wider process window than cage HSQ. For t ...
Loadlock wafer elevator
Typical applications for this elevator include wafer processing and inspection, wafer furnaces, robotic wafer arms, transport, and FPD processing. It features the Super Smart Ball Bushing bearing guid ...
Fab management and tool integration
Quality Management Component (QMC) and Tool Integration Component (TIC) are the first elements of a factory-wide control system called FAB300 (Factory Automation Blocks), which is designed to control ...
Recirculating etch bath filler
The Ulti-Etch filter provides high flow rates and rapid bath turnover in new-generation etch baths, while ensuring high-efficiency particulate removal and low extractable levels. It uses the crescent- ...
Microfiltration technology
Exxflow is a microfiltration technology that builds a dynamic filtration layer from the natural precipitate of solids present in the process solution on a fabric membrane. The system is well suited to ...
CMP slurry filtration
Due to their tangential flow, Spiraltek filters meet the special requirements of CMP slurries. Unlike conventional filters, they retain gelatinous material and prevent premature plugging. Agglomeratio ...
Etch bath filter
The STyLUX polyethersulfone membrane filter is designed to control contamination in etch baths. Without changing housings, the filter`s exceptional flow rate allows for upgraded filtration to 0.1 or 0 ...
Clean bench
Clean bench
The Heraguard workbench ensures a particulate-free environment for the testing and packaging of electronic components. A horizontally conducted flow of extremely pure, multifiltered air prevents parti ...
Liquid particle counters
The PLCA-700 series liquid particle counters provide 0.1-?m sensitivity in all types of liquid with 100% counting efficiency. Operating on-line, the counters give high-sensitivity measurements from 0. ...
Second cassette for wafer prober
The PS21 automatic prober now has a second cassette option that is available for both dc and RF wafer probing, allowing users to test 50 wafers continuously. The more automated process also lets users ...
Grazing angle objective
This new grazing angle objective uses a high angle of incidence to provide sensitive reflection absorption measurements of the sample surface. It can be used in conjunction with this company`s FT-IR m ...
Wafer Inspection and defect review
This system allows an automated approach to patterned wafer inspection for process diagnostics of 300-mm processing tools. Defect review is possible at high magnifications and in various imaging modes ...
Automated TEM sample preparation
AutoFIB is a new control software for automated transmission electron microscope (TEM) sample preparation, using a focused ion beam (FIB), that makes sample preparation less labor-intensive. The simpl ...
Plasma process characterization
Series 1000 EQP is a high-sensitivity combined ion energy analyzer and quadrupole mass spectrometer designed expressly for the characterization of plasma processes. It combines a high-performance, tri ...
Thin film and surface analysis
The I-Elli2000 multiple wavelength imaging ellipsometer is designed for analysis of multiple layer systems. Its real-time imaging capability makes it possible not only to characterize the film in numb ...
Defect imaging and CD measurement
The HCS-UV optical system extends the range of fully automatic inspection and measuring systems with UV capabilities. A non-immersion, highly corrected UV objective, PL APO 150? with 0.90 NA, generate ...
Resistance/resistivity measurement
The LEI 1510 contactless measurement system, for wafers up to 200-mm, is equipped with a three-range measurement head that measures high-range, low-range, and extra low-range samples. It can measure s ...
Thin film stress and flatness tool
The FSM128LC2C is a fully automated film stress and flatness tool that handles 300-mm wafers. It comes in an open cassette version or a fully FOUP integrated system, and up to two buffers are availabl ...
Ellipsometry for 300-mm wafers
The SD3400 ellipsometer is a thin-film measurement system for substrates of 200- or 300-mm that can determine the thicknesses, refractive indices, and absorption constants of thin films from 0 nm to a ...
Tip evaluation system
Available for all NanoScope Dimension and MultiMode scanning probe/atomic force microscopes, this tip evaluation system determines whether the tip meets a selected sharpness criterion or should be rep ...
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