Automated DUV inspection system
Axiospect 300 is a 300-mm automated DUV system for inspection and defect analysis of 0.13-?m geometries and beyond. It offers complete DUV inspection capabilities, such as visual defect review and cla ...
Data analysis software for parametric test
KTE WaferMap software is used for process monitoring and device characterization. It offers comprehensive wafer mapping, statistical analysis, and pass/fail determination of real-time or stored test r ...
Automated in-line dispense nd cure system
This high-speed, fully automated fluid dispensing and curing system handles a wide range of advanced semiconductor package and board assembly applications. The process module integrates Millennium dis ...
Machine vision inspection software
Patinspect is a machine vision software tool for detecting and classifying defects on objects. Incorporating PatMax object location technology, it can accurately find defects even when the object has ...
Multichamber RTP system
The AST EVOLUTION rapid thermal processing (RTP) tool is an advanced multichamber system, whose primary application - in the advanced configuration - is gate-stack formation, integrating pre-clean, RT ...
STEAG AST Electronik
Moves automation software, for the XL800 series of SEMs and DualBeam defect review and characterization tools, provides operators with fast, accurate, and automated access to the best available image ...
Thermal control system
The ETC 1000 thermal control system delivers very good performance for die and transistor junction temperature control, especially for high-power devices such as microprocessors and system-on-chip ASI ...
Vibration isolation system
STACIS 2000 is an active piezoelectric vibration control system that also incorporates passive vibration isolation, virtually canceling vibration across a broad frequency range. The main components of ...
Die Bonder
The Dr. Tresky T-3002 manual die bonder and component placer separates the die from the foil by pull down of the foil. The die is supported by the fixed ejector needle and remains stationary, which re ...
Advanced autopolish module
The Autopolish module is to be used with the Chip Unzip backside silicon thinning hardware on both devices and wafers. The Chip Unzip thins backside silicon to as little as 40 microns in order to perm ...
Ultra shallow junction
The Ultra-Shallow Junction (USJ) module is a combination of ion-implant and rapid thermal processing technologies that will enable chipmakers to form the transistor junctions required for faster devic ...
Chemical stripper
Crystalbond 509-S, an environmentally friendly agent and chemical stripper, eliminates the necessity for using acetone and other flammable solvents. It removes polymer coatings and inorganic particula ...
Liquid partile sensor
The Liquistat particle sensor is designed for in-line monitoring of corrosive chemicals used in delivery systems or in the manufacturing process. The sensor operates by sampling 100% of the volume at ...
Wafer bumping machine
The DS-1 wafer bumping machine is a "drop-on demand" metal jet system for deposition of solder balls on silicon wafers. It is able to deposit spheres with diameters ranging from 60-105 ?m. The DS-1 is ...
Mass spectrometry system
The OmniStar mass spectrometry system is suited for exhaust monitoring of CVD processes, process control during production, and service/maintenance of CVD tools. It monitors all key functions includin ...
Multivalve modular manifold system
The Mace multivalve modular manifold system stands up to aggressive CMP slurries and can be used for ultrapure DI water distribution. Mace valves are constructed of fluoropolymer HyQ PTFE, manufacture ...
The debate over gas purity
The current recession in the semiconductor industry is spurring IC manufacturers to re-examine all manufacturing costs even more vigorously than usual. Although "bulk" (i.e., N2, O2, H2, He, Ar) and s ...
Conference Program
SEMICON Southwest `98 programs and events begin Sunday, October 18, and continue through Saturday, October 24. The exposition will have more than 800 booths from more than 630 companies and will be he ...
Steam-based RTP for advanced processes
Rapid thermal processing in steam-containing ambients is a new method that is strongly aligned with current and anticipated future device needs. There are numerous advantages of steam-based rapid ther ...
Educating cleanroom-facility construction managers
Partnering between industry and academia provides a unique educational opportunity. In particular, this approach has proven valuable for educating professionals involved with design and construction, ...
Integrated MEMS UHP pressure transducers
Integrating a piezoresistive MEMS chip with a stainless-steel membrane produces a compact, ultra-high-purity pressure transducer. The combination of the proper materials and an optimum design improves ...
Out with conglomerates; in with alliances
Business structures are always changing. A few decades ago, huge conglomerates brought together disparate businesses into massive cash flow machines. Harold Geneen, who learned the style in the aerosp ...
News Updates
Praxair, Danbury, CT, said it is expanding its gas and chemical services with Praxair Point One fab integration, which offers gas and chemical management from initial planning through startup. The off ...
Worldwide highlights
Slow July for equipment orders. North American equipment orders for July were at their lowest level in almost four years, and the book-to-bill ratio of 0.69 is the lowest in at least seven years, acco ...
USA
Novellus Systems has cut another 10% from its workforce, and plans to take a $5 million charge to cover the cost of the program in its 3Q. This is the second round of layoffs Novellus has initiated th ...
Japan
Tokyo Electron Yamanashi Ltd. (TEL) and Air Liquide America Corp., Houston, TX, have partnered to characterize the emissions of etch tools at TEL`s research facility in Nirasaki, Japan, to provide IC ...
Asia / Pacific
Taiwan Semiconductor Manufacturing Co. (TSMC), Hsinchu, Taiwan, has ramped its 0.25-?m process to high yield production in record time to support accelerating customer demand. About 15 0.25-?m custome ...
Europe
RTP systems maker STEAG AST Elektronik, Kirchheim, Germany, has filed a suit in German courts alleging Applied Materials` Centura RTP system infringes its German RTP-related patents granted in 1993. L ...
Rest of the world
Luxell Technologies Inc., Mississauga, Ontario, Canada, a developer of flat panel thin-film electroluminescent (TFEL) displays, has received a contract from US-based Oceaneering Space Systems to suppl ...
Linkage of test data with front-end metrology
With chipmakers striving to boost profits through improved fab productivity and yield enhancement analysis, much effort is being devoted to developing systems for collection and analysis of process da ...
Factory Mutal and Sematech establish protocols
Work has begun in earnest at Factory Mutual`s research and engineering arm on a SEMATECH-contracted project that will help establish protocols for determining how new noncombustible plastics fit with ...
Wafer-level packaging technology milestones
Texas Instruments (TI) has begun applying wafer level packaging with its storage product ICs, including wafers from Silicon Systems and Intersect Technologies. Specifically, TI is using Flip Chip Tech ...
IBM to adopt SIMOX material
In a move that boosts both silicon-on-insulator technology in general, and the SIMOX method of SOI formation in particular, IBM Microelectronics will start volume production of high-speed logic device ...
Study shows deviceNet widely adopted
A recent user study by industry analyst Venture Development Corp. (VDC) reports extensive and expanding adoption of DeviceNet - the sensor actuator bus adopted by a large percent of semiconductor manu ...
ARO coating passes 1 billion pulse mark at MIT
Researchers at MIT Lincoln Laboratory, Lexington, MA, have reached a milestone in durability testing for 193-nm lithography applications with a coating from Alpine Research Optics (ARO), Boulder, CO. ...
TI plans 0.1-um for 2001
Texas Instruments (TI) has disclosed aggressive plans to bring a 0.1-?m patterned transistor mixed-signal CMOS process into volume production on 300-mm wafers by 2001. The production technology would ...
Video from "camera-on-a-chip" technology, soon
Vanguard International Semiconductor, Hsinchu, Taiwan, has licensed high-performance CMOS "camera-on-a-chip" technology from Lucent Technologies` Bell Labs, Murray Hill, NJ. This technology is slated ...
Army grant for artifical eye
The University of Michigan College of Engineering has been awarded a $1.6 million US Army grant to design an artificial eye on a microchip - an optoelectronic device capable of sensing and processing ...
SGL offers alternatives to graphics
A carbon/carbon composite material once destined for use in rocket nozzles is now being introduced as an alternative to graphite in the CZ crystal pulling furnace market, and may help increase wafer y ...
NEC opens new R&D fab
Japanese chip giant NEC has formally opened its new semiconductor R&D facility at its plant in Sagamihara, outside Tokyo. Known as the UC Plant, the facility is designed to handle process development ...
1st Silicon builds fab in Malaysia
A Malaysian fab project has obtained funding and named former Thesys executive Claudio Loddo to head its efforts. Plans now call for the 1st Silicon organization to begin construction of a 200-mm foun ...
Chartered implements CMP
Chartered Semiconductor`s CMP program is seeing rapid growth as it brings up 0.35-?m and below processes, but the Singapore foundry is finding that a lack of local consumables support has become a cri ...
New Taiwan consortium
Taiwan`s government-sponsored Electronics Research Service Organization (ERSO) will be involved in the formation of a SEMATECH-like research consortium on the island. Taiwan Semiconductor Industry Ass ...
TEL sees US sales grow
Tokyo Electron Ltd. (TEL) is feeling the industry downturn in many regions, but US sales are continuing to increase this year, says Barry Rapozo, president of Tokyo Electron America (TEA). "My revenue ...
Siemens to close
Siemens is planning to close its North Tyneside, England, DRAM fab after a significant manufacturing contract with Taiwan`s Mosel Vitelic was terminated and efforts to find a buyer for the plant faile ...
Philips invests in discrete technologies
In an investment of more than $106 million, Philips Semiconductors Inc., Sunnyvale, CA, an affiliate of Philips Electronics NV, Eindhoven, The Netherlands, has opened PowerFab 2, an advanced power di ...
Hyundai freezes Scotland fab
Hyundai Semiconductor Europe has once again postponed work on its fab in Dunfermline, Scotland, and this time is considering a direct move to the project`s second phase: 256-Mbit DRAMs on 300-mm wafer ...
Assembly foundry opens in Belgium
Custom Silicon Configuration Services NV (CS2), Zaventem, Belgium, is a new European semiconductor assembly foundry company for advanced packaging technologies. CS2 has been established through IT-Par ...
RVSI Vanguard
Tucson, AZ, a maker of automated solder ball placement systems for backend package assembly, has added two new European representatives - High Tech Trade GmbH (HTT) of Germany and Alliance Sales (Euro ...
Nine-inch reticles: An Analysis
One of today`s possible fundamental changes for semiconductor manufacturing is the adoption of so-called 9-in. reticles to replace 6-in. reticles. After they were officially defined in 1997 as 230 ? 2 ...
Fab planning: trading in your spreadsheet
Every semiconductor production manager has the responsibility of maximizing the company`s return on assets while meeting customer expectations. The classic tool for this effort -an elaborate spreadshe ...
Hazardous gases emitted by ion implanters: Characterization and abatement
Ion implantation processes use a number of hazardous and reactive materials to dope target substrates. While the use of SDS gas sources brings about significant safety improvements, there is insuffici ...
Y2K optical lithography
With this issue, Solid State Technology begins its 1998 special focus on optical lithography for the year 2000. Looking ahead, the current Asian contagion or financial turmoil is expected to affect re ...
1998 capital spending trends: Boom to bust
Two of the driving forces in the IC industry today are capacity and production (output). The 1990s have thus far experienced both extremes of the capacity spectrum. While the 1993-1995 timeframe witne ...
People Updates
Denmark Automation, Sunnyvale, CA, has named Mila Genov president and CEO. She has more than 15 years of experience in the semiconductor industry, in a number of executive-level marketing and manufact ...
Visibility for SEMI standard
We are always interested in getting some visibility for SEMI standards and, in this case, are hopeful that the article "More Asian participation needed to develop global SEMI standards," published rec ...
Stuffed barrier claims
With regard to Ron Nowicki`s letter in the August issue (p. 18), I think the first use of "stuffed barriers" was described in a 1976 paper (P.H. Holloway, et al., J. Appl. Phys. 47, 3769). Evaporation ...
Germanium emitters questioned
I read with great interest "Deposits on Semiconductor Corona Emitters in Cleanroom and Simulated Air" (July, p. 249) by Dr. Charles Noll of Simco Corp. While I question the relevance to the semiconduc ...
Literature Update
A full-color brochure presents equipment engineers with information on new heating, sensing, and control solutions, and explains their integration throughout the entire semiconductor fabrications proc ...
Dispensing systems for fluids
The Millennium Series dispensing system, featuring the DP Series linear pump, is designed specifically to apply the thick thermally conductive fluids used on microprocessors and other high-speed/high- ...
Baseplat feedthroughs
This new line of baseplate feedthroughs with a simple flexible design can be used in multiple configurations to meet all high vacuum applications. The feedthroughs include more then 25 standard basepl ...
Polymeric materials for wafer handling and processing
Vespel is a unique polymeric material that exhibits good cleanliness, resists chemical attack, offers good dielectric and insulative performance, minimizes in-chamber particles, and provides dimension ...
Rooftop lithography chemical air filter
The Vaporsorb rooftop lithography chemical air filter offers protection against the full range of total molecular base gas phase contaminants. It effectively removes airborne molecular contaminants, r ...
Paddle wheel for control of liquid flows
The Teflon paddle wheel is designed to provide performance and accuracy for the monitoring and control of liquid flows. TPW Series flowmeters utilize fiber-optics to send a beam of light across the fl ...
Two-stage heated valve
This new line of HPS Jalapeno series heated two-stage vacuum valves is designed to be used in applications such as low pressure CVD, where production byproducts can condense and build up. The valve wi ...
Changeover manifold
The Model 8303 ChangeOver Manifold eliminates downtime by providing constant, uninterrupted gas flow. It also permits scheduled cylinder changeouts whenever convenient and increases system purity for ...
Wafer bumping printer for stencil printing
The WP-1 wafer bumping printer is used for precision stencil printing of solder paste on silicon wafers. The system is also designed for printing conductive epoxies and other materials on wafers. The ...
Furance cooling system
The FastCool Element System accelerates semiconductor furnace cooling while the product remains in the process chamber. During temperature ramp segments, it maintains a controlled atmosphere that prev ...
Compact, miniature UHV gate valves
The Series 01 mini gate valves feature conventional CF, ISO-KF flanges, or the new quick-change flange design for fast mounting. The valves are available with aluminum or stainless steel bodies in siz ...
Exhaust abatement scrubbers
The C-Series scrubbers are built of Flametec Corzan 4910 CPVC, conforming to the new Factory Mutual test protocol FMRC 4910. They are used to abate toxic and corrosive exhaust from such semiconductor ...
Minienviroment air handling
These custom minienvironment air-handling systems are designed to meet I300I specifications. They precisely fit the equipment footprint to provide 100% filter coverage over a controlled process, resul ...
Photoresist detector
The Preclude photoresist detector continuously polices degas chambers and detects wafers that are contaminated with resist in PVD cluster tools. It scans each wafer as it is degassed and sounds an ala ...
Low-defectivity CMP slurry
SEMI-SPERSE D7000 is a low-defectivity CMP slurry designed for devices of =0.18 ?m. As design rules shrink, small particles and scratches that were previously noncritical can become yield-endangering ...
Dispense connection system
The NOWPak SmartProbe key-coded connector is designed to provide a clean and completely sealed means for dispensing chemical from the NOWPak container and to eliminate chemical misconnections to proce ...
Chemical blending in the fab
Smart Cart is a chemical transfer system for chemical blending that allows operators to collect a chemical from a bulk supply and transport, dispense, and blend that chemical safely and accurately wit ...
Chemical generation
The GCG-CHEMPURE system generates ultrapure chemicals, including NH4OH and HCl. Designed to be housed in the chemical room of a fab, the compact gas-to-chemical generation system can help to reduce pa ...
PVA material for brush rollers
The Microclean polyvinyl alcohol (PVA) product line is designed to meet chipmakers` needs for increasing cleanliness through reduced levels of contamination from particles, trace metals, and ionic spe ...
High-purity chemical containers
Manufactured by multilayer blowmolding, the FluoroPure high-density polyethylene drum offers safe and ultrapure transport of electronic-grade specialty chemicals in a single- or multiple-use container ...
Pirani gauge sensor
The HPS Series 345 shielded sensor measures from atmosphere to medium vacuum. 345 sensor tubes will operate with the Series 945, 917, 937, and 953 gauge controllers. It has a measurement range of 10-4 ...
Vacuum robot
Using the latest robot technologies and the MagnaTran 7 design, this series of robot options incorporates into new process tool designs or retrofits to existing in-fab tools. The MagnaTran 7 configura ...
Precision magnetic manipulators
These precision magnetic manipulators, Compact PMMs, move samples in and out of both high- and ultrahigh-vacuum systems and control motion within these environments. They provide independent or simul ...
Quartz acid heater
The IQ Quartz in-line acid heater features an ultrapure quartz flow path, free of particle traps and O-ring seals, and a fused resistive heating element on quartz that generates heat transfer up to 99 ...
Post-plasma strip and post-ash cleans
The HydrOzone process, for post-plasma strip, post-ash cleans, organic cleans, and resist stripping applications, uses a mixture of ozone and water to achieve low-cost cleaning, eliminating sulfuric a ...
In situ wafer temperature measurements
The field-proven wafer temperature data logging and monitoring technology of the Thermal TRACK handheld maintenance and troubleshooting product line is now available for use with ProcessProbe thermoco ...
Wafer surface charging
CHARGER 200 is a tool for charging the surface of wafers by using corona discharge, allowing the measurement of the bulk lifetime on oxidized surfaces in connection with the ?-PCD method. The techniqu ...
Ultrapure oxygen
Megapur UHP O2 is 99.99995% pure oxygen with impurities of =500 ppb. It is produced electrolytically from water, and to preserve its integrity it is converted to cryogenic liquid form. Megapur is avai ...
Ultratrace oxygen analyzer
A low detection level of 75 ppt and 50 ppt sensitivity has been achieved in this production-floor oxygen analyzer, the Delta F NanoTrace II. It provides APIMS performance in a hand-carry portable anal ...
Thermal mass flow meters
The Smart series of thermal mass flow meters provides a variety of self-diagnostic and field-adjustment features, as well as the ability to confirm or "field-validate" the meter`s calibration and meas ...
Full-flow ozone sensor
Model gFFOZ ozone sensor is designed for in situ, full-flow monitoring of process ozone. Installed directly in-line in a process stream at the gas delivery point, it provides continuous, in situ measu ...
In situ process monitoring system
Ultratrace-IQ is designed for gas monitoring of process chambers on PVD, CVD, and etch tools, and incorporates a quadrupole gas analyzer designed for process integration and control, with many feature ...
High-performance moisture analyzer
AQUAPRO monitors moisture from 200 ppb to low ppm for high-purity gas production and handling. Effective for continuous, on-line detection of moisture upsets, it also provides rapid response to moistu ...
Ultahigh-purity pressure transducer
Model 216 pressure transducer, for specialty gas and liquids handling, is designed for vacuum to high-pressure measurements. It is suitable for applications requiring rugged packaging, high performanc ...
Wafer transport vehicles
The Machine Loading Robot Vehicle is a track-guided vehicle that transports 300-mm wafers carriers between process tools and stockers in a process bay, loading and unloading individual wafer carriers. ...
Chip tray feeder system
The automated TrayStak feeder system reduces handling and increases throughput by delivering 2-in. chip trays to production assembly machines without interrupting operation. While the operator loads a ...
EGA/lead inspection
PPT4240 is a turnkey, in-tray component inspection system that uses SMI 3-D technology to achieve speeds of >10,000 pph for complete coplanarity, package and mark inspection. At a resolution of 2.5 ?m ...
193-nm ArF excimer laser
The NovaLine A1000 excimer laser, intended for DUV lithography, produces 5 W of output power at a 1-kHz repetition rate. This power is delivered with a spectral bandwidth of <0.6 pm (FWHM), enabling t ...
Stepper lithography exposure tool
Model SIM-3300, an exposure tool that is used to assist in process development, is specifically designed for 248-nm DUV photoresist testing, but is easily adapted for NUV as well. The system includes ...
Laser micromachining
Model SIM-3300, an exposure tool that is used to assist in process development, is specifically designed for 248-nm DUV photoresist testing, but is easily adapted for NUV as well. The system includes ...
SEM and TEM sample perparation
The Maestro series of laser production machines is based on excimer laser technology, focused on micromachining plastics, polymers, ceramics, glass, and semiconductor materials with resolutions better ...
Film thickness metrology tool
SELA STRATEM is an advanced sample preparation system for scanning (SEM) and transmission (TEM) electron microscopy. It combines automation with enhanced target accuracy, increasing process yield and ...
Equipment automation software
SMART-Station software fully automates the operation of fab processing and metrology equipment, providing the critical interface between shop-floor control systems and process and metrology tools on t ...
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