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Microlithography World

Volume: 15
Issue: 4
Date: November 01, 2006
The impact of laser spectrum on lithography
The laser spectrum is best parameterized for lithography by the width that contains 95% of the energy.
Microlithography for on-chip high-Q inductors
On-chip passive electronic components can be integrated into advanced wafer-level packaging and patterned using proximity mask aligners.
Improving 90nm FPGA chips with an alternating phase-shift mask
Existing nonphase-compliant chip designs can be made using a dark field alternating phase shift gate mask if proper EDA steps are taken.
The Lithography Expert: Pattern collapse
Not long ago, defining what an acceptable resist profile looked like was relatively easy.
Cargo cults and the innovation economy
One thing really mystified the people of the South Pacific when the colonists first appeared: “Where did they get all their stuff?” Masses of it seemed to arrive magically as cargo on ship ...
News & Products
At the 3rd annual International Symposium on Immersion Lithography in Kyoto, Japan (Oct.

Past Issues

2006

Volume Issue Date
15 4 Nov 01, 2006
15 3 Aug 01, 2006
15 2 May 01, 2006
15 1 Feb 01, 2006

Previous Years

2008 2007 2005 2004 2003 2002 2000
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